Instrument control
Instrument control and data transfer
Two spec sessions are needed when performing in-situ experiments: The first one is called > spec sputtering and is implemented for remote controlling the vacuum, the deposition and the erosion processes. The second one >speceh1 allows one to control all the other instruments, including motors and the detectors. With independent SPEC sessions, the real time data acquisition and the deposition/etching process can then be switched on and off independently.