Fig. 125: Scanning electron microscope image of quaternary nickel Fresnel zone plates.

The fabrication of a multilevel FZP requires the deposition and alignment of subsequent levels with an accuracy of a fraction of the desired spatial resolution. The geometrical characteristics designed for 8 keV are: focal length, 1 m; diameter, 150 µm; number of levels, 4; and outermost zone-width of the fourth level, 500 nm. Scale bar: 50 µm.

back to: High-Efficiency Blazed Zone-Plate for Multi-keV Energies