XPS/ESCA/AES/LEED
VSW X-ray gun and hemispherical cylindrical analyser (HA100) controlled with HAC5000 electronics.
Back-display LEED (OCI Vacuum Microengineering).
Two Focus evaporators EFM3 for metal deposition.
CAVAC ion-gun for sputtering.
Electron-beaming annealing system (300-1800 K).